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The Chemistry of Metal CVD

Toivo T. Kodas, Mark J. Hampden-Smith




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 | #5239714 in Books |  1994-01-15 | Original language:English |  9.69 x1.19 x6.87l, | File type: PDF | 530 pages

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This work, which considers the chemistry of metals, includes methods of preparing ultra-thin metal films and chemical vapour deposition (CVD), with an emphasis on microelectronics applications. Chapter One, an introduction, discusses the applications of metal CVD as well as the types of processes used for metal deposition, and rationalizes which materials are used and why they are chosen. Chapters Two through Eight discuss CVD of Al (2), W (3), Cu from Cu(II) precursors ...

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