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Surfaces, Interfaces, and Films for Microelectronics

Eugene A. Irene




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 | #5237802 in Books |  2008-02-08 | Original language:English | PDF # 1 |  9.50 x1.25 x6.40l,1.94 | File type: PDF | 536 pages

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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the...

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