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Plasma Etching: An Introduction (Plasma -- Materials Interactions)

From Dennis M Manos Daniel L Flamm




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 | #1989856 in Books |  Dennis M Manos Daniel L Flamm |  1989-08-11 | Original language:English | PDF # 1 |  9.02 x1.06 x5.98l,2.12 | File type: PDF | 476 pages

 | Plasma Etching An Introduction

|

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.



You easily download any file type for your gadget.Plasma Etching: An Introduction (Plasma -- Materials Interactions)   |  From Dennis M Manos Daniel L Flamm. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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