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Plasma Diagnostics, Volume 2: Surface Analysis and Interactions (Plasma-Materials Interactions)

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[PDF.gj30] Plasma Diagnostics, Volume 2: Surface Analysis and Interactions (Plasma-Materials Interactions)

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 | #6040322 in Books |  1989-03-14 | Original language:English | PDF # 1 |  .86 x6.29 x9.34l, | File type: PDF | 337 pages

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Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Plasmas are used in microelectronics to process semiconductors (etching of patterns for microcircuits, plasma-induced deposition of thin films, etc.); plasmas produce deleterious erosion effects on surfaces of materials used for fusion devices and spaceships exposed to the low ...

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