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Nanoimprint Lithography: An Enabling Process for Nanofabrication

Weimin Zhou




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 | #287567 in Books |  2013-01-04 | Original language:English | PDF # 1 |  9.20 x.80 x6.30l,1.45 | File type: PDF | 249 pages

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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
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