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Molecular Beam Epitaxy: Fundamentals and Current Status (Springer Series in Materials Science)

Marian A. Herman, Helmut Sitter




[PDF.lp63] Molecular Beam Epitaxy: Fundamentals and Current Status (Springer Series in Materials Science)

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 | #3615189 in Books |  2013-03-10 |  2013-10-04 | Original language:English | PDF # 1 |  9.25 x1.12 x6.10l,.0 | File type: PDF | 453 pages

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Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this second edition two new fi...

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