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Introduction to Microlithography (ACS Professional Reference Book)

From Brand: American Chemical Society




[PDF.lf74] Introduction to Microlithography (ACS Professional Reference Book)

Introduction to Microlithography (ACS From Brand: American Chemical Society epub
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 | #2947366 in Books |  American Chemical Society |  1994-05-05 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  9.10 x1.40 x6.20l,1.89 | File type: PDF | 540 pages

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||0 of 3 people found the following review helpful.| Excellent!|By Hangwoo Lee|This book is very fundamental. I'm the novice in semiconduct process. It's a excellent book to me

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable t...

You can specify the type of files you want, for your gadget.Introduction to Microlithography (ACS Professional Reference Book)   |  From Brand: American Chemical Society.Not only was the story interesting, engaging and relatable, it also teaches lessons.

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