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Atomic Layer Deposition for Semiconductors

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 | #2985974 in Books |  2013-10-19 | Original language:English | PDF # 1 |  9.38 x.79 x6.43l,1.20 | File type: PDF | 263 pages

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.



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